Contact Sales
Mr. Dr.-Ing. Tobias Metz
Geschäfstführung
Geschäftsführer
SIGA Systeme für industrielle Gasanwendungen GmbH
SIGA GmbH Systeme für industrielle Gasanwendungen
Precursor vaporization systems for CVD, PECVD, and ALD. Liquid and gas supply.
Company profile
Sophisticated systems for handling gases and liquids—that is SIGA. We specialize in precursor vaporization systems for CVD, PECVD, and ALD equipment (handling TMA, DMZ, HMDS, HMDSN, TMDSO, and many others).
Our systems have been used in development and production for 30 years. We manufacture both, series and customer tailored systems for industry and research, combining established standards with innovative solutions.
We supply:
- Precursor vaporization systems for liquid precursors
- Precursor supply systems
- Gas supply systems
As an independent provider, we implement vaporization systems based on all standard technologies, utilizing the optimal available components.
Our systems have been used in development and production for 30 years. We manufacture both, series and customer tailored systems for industry and research, combining established standards with innovative solutions.
We supply:
- Precursor vaporization systems for liquid precursors
- Precursor supply systems
- Gas supply systems
As an independent provider, we implement vaporization systems based on all standard technologies, utilizing the optimal available components.
Application areas
Products and services
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Contact
SIGA GmbH Systeme für industrielle Gasanwendungen
Kesselbodenstr. 4b, 85391 Allershausen, Germany
Contact request