Precision ultrasonic spray coating for complex wafer topographies
Ultrasonic spray is a simple, economical, and repeatable spray coating process for photoresist coatings in photolithography wet processes and protective polyimide films for wafer dicing, providing a practical alternative to spin coating for complex wafer topography. Sono-Tek coating systems enable fine control of flow rate, coating speed, solvent delivery, and deposition amount using an advanced layering technique. Low-velocity spray shaping defines the atomized spray into precise, controllable patterns, producing very thin film layers with uniform coating across complex substrate topography. Direct spray coating using ultrasonic technology is proven to be a reliable and effective lithography method for photoresist coating on 3D microstructures, resulting in reduced device failure.
This content is provided by YouTube. If you load this content, personal data about you will be processed (IP address, sites you have visited) and cookies are set by third parties, which are also used to create user profiles or serve marketing purposes.
When you load the content, you also give your consent in accordance with Art. 49 para. 1 s. 1 lit. a GDPR that your personal data may be transferred to the U.S. despite the existing risk for you. The level of data protection in accordance with the GDPR cannot be ensured. This may for example mean that American authorities (in particular the intelligence services) are given access to your data. Legal protection options against this are currently very limited or even impossible. You will find further information on this in our privacy policy.
You can revoke this consent at any time with effect for the future.
This content is provided by Vimeo. If you load this content, personal data about you will be processed (IP address, sites you have visited) and cookies are set by third parties, which are also used to create user profiles or serve marketing purposes.
When you load the content, you also give your consent in accordance with Art. 49 para. 1 s. 1 lit. a GDPR that your personal data may be transferred to the U.S. despite the existing risk for you. The level of data protection in accordance with the GDPR cannot be ensured. This may for example mean that American authorities (in particular the intelligence services) are given access to your data. Legal protection options against this are currently very limited or even impossible. You will find further information on this in our privacy policy.
You can revoke this consent at any time with effect for the future.
Sono-Tek
2012 Route 9W, Milton, NY 12547, USA
http%3A%2F%2Fexhibitors.electronica.de%2F%2Fprj_809%2Fview%2Findex.cfm%3Fnv%3D2.1%26lng%3D2%26elb%3D239.1100.6160.1.111
