The MUEGGE Group is a global leader in advanced microwave and plasma technology.

The MUEGGE Group is a globally positioned leader in microwave and plasma technology with 40 years of experience. Headquartered in Germany with locations in the USA, Italy, and Singapore, MUEGGE delivers advanced plasma sources, microwave generators incl. solid-state generators and critical process components for semiconductor applications, such as PECVD, PEALD, etching of organic and inorganic materials, chamber cleaning, resist removal and decapsulation.