Coating, etching & cleaning with advanced ion beam & plasma processing equipment

scia Systems develops and manufactures equipment with complex plasma and ion beam technologies for ultra-precise surface processing. The systems are applicable for coating, etching, and cleaning processes, especially for the MEMS, microelectronics, and precision optics industries. Due to their flexible and modular design, the process equipment can be configured according to customer-specific requirements for research applications as well as high-volume production in either a "cluster" or "inline" configuration. Our wide range of processing technologies includes etching processes, like Ion Beam Trimming, Ion Beam Milling, and Reactive Ion Etching, as well as coating processes, such as Ion Beam Sputtering, PECVD, and Magnetron Sputtering.