One stop shop: Concentrators, scrubbers, solvent recovery and oxidation systems.

One stop shop:

Dürr provides concentrators, scrubbers, carbon adsorption solvent recovery, separation, and purification technologies along with oxidation as needed. Dürr analyzes your process and selects the best technologies for your emission composition, backed by a global in-house service and replacement parts organization to support your maintenance needs.

Worldwide successfully executed projects in the semiconductor industry:

• Highly efficient scrubbers for acids
• Selective catalytic reduction (SCR) systems for NOx
• VOC concentrator with electric heated oxidizer
• Heat recovery methods for concentrator regeneration
• Recuperative thermal oxidizer design for easy clean-out of silicone build-up
• Solvent recovery systems