AdensoVAC.ROBOTICS modular robot cluster platform for high vacuum environments
www.waferhandling.solutionsAdenso customers from
OPTICS, SEMI and
SOLAR industry use the modular mainframe platform to easily create their cluster production systems.
OnlineRobot.Configurator:
www.VACROBOTICS.solutionsMany
options allow to
customize the cluster systems for each application:
- Heating up to 1.000°C
- Flipping
- Alignments
- precise vacuum pressure regulation
- Substrate Scanner Solutions for Ion Implantation SystemsAll modules and functions are fully controlled by
adControl, Adenso´s cluster operating system.
Adenso products are developed and produced in Silicon Saxony in and around Dresden, so they are completely Made in Germany.
http://www.adenso.solutions/