MSP, a Division of TSI

SEMICON Europa
 
Wafer Contamination & Cleaning Standards. Vapor Delivery Solutions for ALD & CVD

Company profile

MSP, a Division of TSI®, supports the semiconductor industry with innovative solutions for vapor delivery in CVD and ALD as well as surface defect inspection and metrology. Our instruments and services contain:
  • MSP's Turbo II™ vaporizers, vapor/gas filters, and liquid flow controllers to ensure precise vapor delivery, high-quality thin films, and increased wafer yields
  • Trusted particle deposition systems, certified contamination standards, and reliable particle suspensions to calibrate and optimize wafer/reticle inspection tools and wafer/mask cleaning equipment
We look forward to meeting you at our Booth 722 in Hall B0!

Main exhibitor

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MSP, a Division of TSI
5910 Rice Creek Pkwy #300, Shoreview, MN 55126, USA
Contact request
Contact
Ms. Kathy Erickson
Marketing
Sr. Manager, Product Management & Marketing
MSP, a Division of TSI
Contact
Mr. Erik Anderson
Marketing
Sr. Global Product Management - Metrology
MSP, a Division of TSI
Contact
Ms. Kimberly Meyer
Marketing
Global Product Manager – Vaporizers
MSP, a Division of TSI