Complete fab solutions. From cleanroom to exhaust.

Pfeiffer Vacuum+Fab Solutions supplies turbopumps, dry vacuum pumps and measurement equipment for applications including PVD, CVD, lithography, etch and implant processes as well as back-end applications. For inspection and metrology, we provide low-vibration vacuum solutions.
Additionally, we offer leak detectors and systems for contamination management. Pfeiffer also manufactures flanges, valves, fittings and chambers as well as custom components.
Pfeiffer is part of the Busch Group, one of the world´s largest manufacturers of vacuum pumps, vacuum systems, blowers, compressors and gas abatement systems. It is managed by the Busch family. More than 8,000 employees in 47 countries worldwide work for the group, which has an annual consolidated revenue of 2 billion Euro.