High quality R&D, joint research and training of staff in the field of MEMS

Microsystem Integration Center (μSIC), Tohoku University, is a R&D organization for manufacturing and system integration centered on microsystem technology. It is also active in device design, development and test. We are collaboration widely with industry.
Open Collaboration: In a 1,800m² clean room, we operate a wide range of semiconductor process / evaluation equipment for microfabrication technologies. Own processes as well as training can be done.
R&D: We promote joint research with companies that want to utilize the technological seeds of Tohoku University, or follow their own idea with our support. We cover a wide range of fields from basic MEMS development, up to system verification. There are many successful cases of commercialization through joint development in our center.