Micro System Integration Center, Tohoku University
High quality R&D, joint research and training of staff in the field of MEMS
Microsystem Integration Center (μSIC), Tohoku University, is a R&D organization for manufacturing and system integration centered on microsystem technology. It is also active in device design, development and test. We are collaboration widely with industry.
Open Collaboration: In a 1,800m2 clean room, we operate a wide range of semiconductor process / evaluation equipment for microfabrication technologies. Own processes as well as training can be done.
R&D: We promote joint research with companies that want to utilize the technological seeds of Tohoku University, or follow their own idea with our support. We cover a wide range of fields from basic MEMS development, up to system verification. There are many successful cases of commercialization through joint development in our center.
Micro System Integration Center, Tohoku University
Aoba-ku, Aramaki-Aza-Aoba 519-1176, Sendai 980-0845, Japan
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Mr. Professor Kentaro Totsu
Micro System Integration Center
Director
Tohoku University
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Mr. Associated Professor Joerg Froemel
Micro System Integration Center
Tohoku University
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Ms. Assistant Proffessor Noriko Tsuruoka
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