Adenso VAC.ROBOTICS modular robot cluster platform for high vacuum environments

Adenso
VAC.ROBOTICS modular robot cluster platform for high vacuum environments
www.waferhandling.solutions

Adenso customers from OPTICS, SEMI and SOLAR industry use the modular mainframe platform to easily create their cluster production systems.

OnlineRobot.Configurator:  www.VACROBOTICS.solutions

Many options allow to customize the cluster systems for each application:
- Heating up to 1.000°C
- Flipping
- Alignments
- precise vacuum pressure regulation
- Substrate Scanner Solutions for Ion Implantation Systems

All modules and functions are fully controlled by adControl, Adenso´s cluster operating system.

Adenso products are developed and produced in Silicon Saxony in and around Dresden, so they are completely Made in Germany.
http://www.adenso.solutions/