Weltleitmesse und Konferenz der Elektronik
15.-18. November 2022 | Messe München
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Reticle inspection & cleaning, concentration & process monitoring, fluid control


HORIBA is not just a company making products. HORIBA is a technology company whose products are a result of an enormous capability in our core competencies and engineering expertise. The combined capability of our R&D centres around the world places HORIBA as a unique solutions supplier in the field of Measurement and Analysis. Our core competences in the semiconductor industry are:

- Fluid Control (Gas & Liquid), Mass Flow, Vaporizer, Pressure Control

- Dry Process Monitoring in Real Time by OES & Interferometry

- Gas Concentration Monitoring

- Wet Process Monitoring, SC-1, SC-2, SPM, HF, Ozone, Peroxide, Dissolved Oxygen, TMAH, Micro-pH

- Particle Inspection for Photomasks